Chou, StephenChang, Daniel H.2014-09-222026-09-292014-09-222026-09-29200822259http://arks.princeton.edu/ark:/88435/dsp01j6731581phttps://theses-dissertations.princeton.edu/handle/88435/dsp01j6731581p18 PagesNanoImprint Lithography of Dielectric Structures via Sacrificial PolymersPrinceton University Senior Theses