SOLUTION-BASED DEPOSITION OF ZIRCONIA THIN FILM AS SCAFFOLDING FOR CELL ADHESION AND ALIGNMENT

Abstract

A solution-based deposition method as an alternative to chemical vapor deposition (CVD) for the construction of zirconia (ZrO2) thin films is described. The solutions of zirconium tetra (tert-butoxide):hexane and zirconium tetraispropoxides:hexane were drop-casted and spin-coated onto plain and photolithographically patterned silicon surfaces, then annealed at photolithographically patterned silicon surfaces, then annealed at 100˚C. Surface characterizations done by XPS, AFM, SEM and EDX suggest drop casting 3-4 drops of Zirconium tetra (tert-butoxide):hexane solution generates zirconia films that are nanoscale in thickness without forming zirconiua nodules. The film also showed good pattern fidelity, and functioned well as a metal oxide scaffolding for 1,4-diphosphonobutane. Cell and media studies done on films generated by the proposed solution-based deposition methods showed the self-assembled monolayer of phosphonates constructed on the zirconia film was capable of aligning cells cultured under 3 days, without the film itself eroding in biologic media conditions.